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With this fully updated second edition, you will gain a detailed understanding of the physics and applications of modern x-ray and extreme ultraviolet (EUV) radiation sources.


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INTRODUCTION 1 1.1 The Soft X-Ray and Extreme Ultraviolet Regions of the Electromagnetic Spectrum 1 1.2 Basic Absorption and Emission Processes 5 1.3 Atomic Energy Levels and Allowed Transitions 10 1.4 Scattering, Diffraction, and Refraction of Electromagnetic Radiation 18 References 21 Homework Problems 23 CHAPTER 2.


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This self-contained, comprehensive book describes the fundamental properties of soft x-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft x-ray biomicroscopy.


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(a) Calculate the δ value of the refractive index of silicon by assuming a semi-classical atomic model with two electrons associated with a K-edge resonance at 1840 eV, eight electrons associated with an L-edge resonance at 99.2 eV, and four electrons associated with a UV resonance at 6 eV.


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